Thin Films Technology
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Book Overview This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the phy...
This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.
Book Details Format: Hardcover | Pages: 236 | Language: English | Publisher: WORLD SCIENTIFIC PUB CO INC | ISBN: 9811246327
FormatHardcover
Pages236
LanguageEnglish
ISBN9811246327
EAN9789811246326
PublisherWORLD SCIENTIFIC PUB CO INC
Publication Date1970-01-01
AccessoriesNo Accessory
ConditionNew
Product TypeHARD COVER BOOKS
Weight1.07 Pounds
Length9.0 Inches
Width6.0 Inches
Height0.56 Inches
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